Investigation of Surface Defects in Optical Components Based on Reflection Mueller Matrix Spectroscopy

Nanoscale defects on the surface of ultra-precision optical elements seriously affect beam quality in systems. In response to challenge detecting nanoscale component surfaces, we propose a method for detection and classification various types surfaces via reflection Mueller matrix spectroscopy (RMMS). Firstly, an electromagnetic scattering theoretical model incident scattered fields were established by combining bidirectional distribution function (BRDF) Rayleigh–Rice vector theory. Then, optimal conditions RMMS measurements determined numerically simulating BRDF. On this basis, roughness pockmarks test plate simulated analyzed RMMS, results verified experimentally; then, dirty particles above element subsurface bubble (SSBD) RMMS. The showed that some could significantly distinguish with dimensions smaller than visible wavelength, be inverted using values elements. This provides basis reference precision components.